GB/T 28632-2012

Active

Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution

表面化学分析 俄歇电子能谱和X射线光电子能谱 横向分辨率测定

Standard Type
GBT
ICS
71.040.40
CCS
G04
Status
现行
Issue Date
2012-07-31
Implementation
2013-02-01
Responsible Dept
中国科学院
Drafting Unit
N/A