GB/T 28277-2012

Active

Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area

硅基MEMS制造技术 微键合区剪切和拉压强度检测方法

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2012-05-11
Implementation
2012-12-01
Responsible Dept
国家标准委
Drafting Unit
N/A