GB/T 28274-2012

Active

Silicon-based MEMS fabrication technology - The basic regulation of layout design

硅基MEMS制造技术 版图设计基本规则

Standard Type
GBT
ICS
31.200
CCS
L55
Status
现行
Issue Date
2012-05-11
Implementation
2012-12-01
Responsible Dept
国家标准委
Drafting Unit
N/A