Home / Standards / GB/T 26112-2010 GB/T 26112-2010 Active Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters 微机电系统(MEMS)技术 微机械量评定总则 Standard Type GBT ICS 31.200 CCS L55 Status 现行 Issue Date 2011-01-10 Implementation 2011-10-01 Responsible Dept 国家标准委 Drafting Unit N/A