GB/T 26111-2023

Active

Micro-electromechanical system technology—Terms

微机电系统（MEMS）技术 术语

Standard Type
GBT
ICS
31.080.99
CCS
L59
Status
现行
Issue Date
2023-05-23
Implementation
2023-09-01
Responsible Dept
国家标准委
Drafting Unit
N/A