Home / Standards / GB/T 26111-2010 GB/T 26111-2010 Abolished Micro-electromechanical system technology - Terms 微机电系统(MEMS)技术 术语 Standard Type GBT ICS 31.200 CCS L55 Status 废止 Issue Date 2011-01-10 Implementation 2011-10-01 Responsible Dept 国家标准委 Drafting Unit N/A