GB/T 26068-2018

Active

Test method for carrier recombination lifetime in silicon wafers and silicon ingots—Non-contact measurement of photoconductivity decay by microwave reflectance method

硅片和硅锭载流子复合寿命的测试 非接触微波反射光电导衰减法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2018-12-28
Implementation
2019-11-01
Responsible Dept
国家标准委
Drafting Unit
N/A