GB/T 26068-2010

Abolished

Test method for carrier recombination lifetime in silicon wafers by non-contact measurement of photoconductivity decay by microwave reflectance

硅片载流子复合寿命的无接触微波反射光电导衰减测试方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
废止
Issue Date
2011-01-10
Implementation
2011-10-01
Responsible Dept
国家标准委
Drafting Unit
国家标准委