GB/T 26065-2010

Active

Specification for polished test silicon wafers

硅单晶抛光试验片规范

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2011-01-10
Implementation
2011-10-01
Responsible Dept
国家标准委
Drafting Unit
国家标准委