GB/T 25915.9-2018

Active

Cleanrooms and associated controlled environments—Part 9: Classification of surface cleanliness by particle concentration

洁净室及相关受控环境 第9部分：按粒子浓度划分表面洁净度等级

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2018-06-07
Implementation
2018-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A