GB/T 25915.2-2021

Active

Cleanrooms and associated controlled environments—Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

洁净室及相关受控环境 第2部分:洁净室空气粒子浓度的监测

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2021-08-20
Implementation
2022-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A