GB/T 25915.17-2024

Active

Cleanrooms and associated controlled environments—Part 17: Particle deposition rate applications

洁净室及相关受控环境 第17部分：粒子沉积速率应用

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2024-08-23
Implementation
2025-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A