GB/T 25915.14-2022

Active

Cleanrooms and associated controlled environments—Part 14: Assessment of suitability for use of equipment by airborne particle concentration

洁净室及相关受控环境 第14部分：按粒子浓度评估设备适用性

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2022-12-30
Implementation
2023-07-01
Responsible Dept
国家标准委
Drafting Unit
N/A