GB/T 25915.12-2021

Active

Cleanrooms and associated controlled environments—Part 12: Specifications for monitoring of air cleanliness by nanoscale particle concentration

洁净室及相关受控环境 第12部分：监测空气中纳米粒子浓度的技术要求

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2021-10-11
Implementation
2022-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A