GB/T 25915.10-2021

Active

Cleanrooms and associated controlled environments—Part 10: Classification of surface cleanliness by chemical concentration

洁净室及相关受控环境 第10部分：按化学物浓度划分表面洁净度等级

Standard Type
GBT
ICS
13.040.35
CCS
C70
Status
现行
Issue Date
2021-08-20
Implementation
2022-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A