GB/T 25755-2010

Active

Vacuum technology - Sputter-ion pumps - Measurement of performance characteristics

真空技术 溅射离子泵 性能参数的测量

Standard Type
GBT
ICS
23.160
CCS
J78
Status
现行
Issue Date
2010-12-23
Implementation
2011-10-01
Responsible Dept
中国机械工业联合会
Drafting Unit
N/A