GB/T 24582-2023

Active

Test method for measuring surface metal impurity content of polycrystalline silicon—Acid extraction-inductively coupled plasma mass spectrometry method

多晶硅表面金属杂质含量测定 酸浸取-电感耦合等离子体质谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2023-08-06
Implementation
2024-03-01
Responsible Dept
国家标准委
Drafting Unit
N/A