GB/T 24581-2022

Active

Test method for Ⅲ and Ⅴ impurities content in single crystal silicon—Low temperature FT-IR analysis method

硅单晶中III、V族杂质含量的测定 低温傅立叶变换红外光谱法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
现行
Issue Date
2022-03-09
Implementation
2022-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A