GB/T 24581-2009

Abolished

Test method for low temperature FT-IR analysis of single crystal silicon for Ⅲ-Ⅴ impurities

低温傅立叶变换红外光谱法测量硅单晶中III、V族杂质含量的测试方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
废止
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A