GB/T 24578-2015

Abolished

Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy

硅片表面金属沾污的全反射X光荧光光谱测试方法

Standard Type
GBT
ICS
77.040
CCS
H17
Status
废止
Issue Date
2015-12-10
Implementation
2017-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A