GB/T 24577-2009

Active

Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography

热解吸气相色谱法测定硅片表面的有机污染物

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A