Home / Standards / GB/T 24575-2009 GB/T 24575-2009 Active Test method for measuring surface sodium,aluminum,potassium,and iron on silicon and epi substrates by secondary ion mass spectrometry 硅和外延片表面Na、Al、K和Fe的二次离子质谱检测方法 Standard Type GBT ICS 29.045 CCS H80 Status 现行 Issue Date 2009-10-30 Implementation 2010-06-01 Responsible Dept 国家标准委 Drafting Unit N/A