GB/T 24468-2009

Abolished

Specification for definition and measurement of semiconductor equipment reliability, availability, and maintainability(RAM)

半导体设备可靠性、可用性和维修性（RAM）的定义和测量规范

Standard Type

GBT

ICS

17.040.30

CCS

L85

Status

废止

Issue Date

2009-10-15

Implementation

2009-12-01

Responsible Dept

国家标准委

Drafting Unit

N/A