Home / Standards / GB/T 21287-2021 GB/T 21287-2021 Active Electronic specialty gas—Nitrogen trifluoride 电子特气 三氟化氮 Standard Type GBT ICS 71.100.20 CCS G86 Status 现行 Issue Date 2021-10-11 Implementation 2022-05-01 Responsible Dept 国家标准委 Drafting Unit N/A