GB/T 21287-2021

Active

Electronic specialty gas—Nitrogen trifluoride

电子特气 三氟化氮

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
现行
Issue Date
2021-10-11
Implementation
2022-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A