Home / Standards / GB/T 20176-2006 GB/T 20176-2006 Abolished Surface chemical analysis-Secondary-ion mass spectrometry-Determination of boron atomic concentration in silicon using uniformly doped materials 表面化学分析 二次离子质谱 用均匀掺杂物质测定硅中硼的原子浓度 Standard Type GBT ICS 71.040.40 CCS N33 Status 废止 Issue Date 2006-03-27 Implementation 2006-11-01 Responsible Dept 中国科学院 Drafting Unit N/A