GB/T 20175-2025

Active

Surface chemical analysis—Sputter depth profiling—Optimization using layered systems as reference materials

表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法

Standard Type
GBT
ICS
71.040.40
CCS
G 04
Status
现行
Issue Date
2025-06-30
Implementation
2026-01-01
Responsible Dept
中国科学院
Drafting Unit
N/A