Home / Standards / GB/T 19922-2005 GB/T 19922-2005 Active Standard test methods for measuring site flatness on silicon wafers by noncontact scanning 硅片局部平整度非接触式标准测试方法 Standard Type GBT ICS 77.040.01 CCS H17 Status 现行 Issue Date 2005-09-19 Implementation 2006-04-01 Responsible Dept 工业和信息化部（电子） Drafting Unit 工业和信息化部（电子）