GB/T 19921

Active

Test method for particles on polished silicon wafer surfaces

硅抛光片表面颗粒测试方法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2018-12-28
Implementation
2019-07-01
Responsible Dept
国家标准委
Drafting Unit
国家标准委