GB/T 19444-2025

Active

Test method for oxygen precipition characteristics of silicon wafers—Interstitial oxygen reduction

硅片氧沉淀特性的测试 间隙氧含量减少法

Standard Type
GBT
ICS
77.040
CCS
H 21
Status
现行
Issue Date
2025-06-30
Implementation
2026-01-01
Responsible Dept
国家标准委
Drafting Unit
N/A