GB/T 17866-1999

Active

Guideline for programmed defect masks and benchmark procedures for sensitivity analysisof mask defect inspection systems

掩模缺陷检查系统灵敏度分析所用的特制缺陷掩模和评估测量方法准则

Standard Type
GBT
ICS
31.200
CCS
L56
Status
现行
Issue Date
1999-09-13
Implementation
2000-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A