Home / Standards / GB/T 16880-1997 GB/T 16880-1997 Active Guidelines for photomask defect classification and size definition 光掩模缺陷分类和尺寸定义的准则 Standard Type GBT ICS 31.020 CCS L97 Status 现行 Issue Date 1997-06-20 Implementation 1998-03-01 Responsible Dept 国家标准委 Drafting Unit N/A