Home / Standards / GB/T 16879-1997 GB/T 16879-1997 Active Guidelines for precision and accuracy expression for mask writing equipment 掩模曝光系统精密度和准确度的表示准则 Standard Type GBT ICS 31.020 CCS L97 Status 现行 Issue Date 1997-06-20 Implementation 1998-03-01 Responsible Dept 国家标准委 Drafting Unit N/A