Home / Standards / GB/T 16878-1997 GB/T 16878-1997 Active Specification for metrology pattern cells for integrated circuit manufacture 用于集成电路制造技术的检测图形单元规范 Standard Type GBT ICS 31.200 CCS L97 Status 现行 Issue Date 1997-06-20 Implementation 1998-03-01 Responsible Dept 国家标准委 Drafting Unit N/A