GB/T 16527-1996

Active

Specification for photoresist/E-beam resist for hard surface photoplates

硬面感光板中光致抗蚀剂和电子束抗蚀剂规范

Standard Type
GBT
ICS
31.200
CCS
L90
Status
现行
Issue Date
1996-09-09
Implementation
1997-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A