GB/T 16523-1996

Active

Specification for round quartz photomask substrates

圆形石英玻璃光掩模基板规范

Standard Type
GBT
ICS
31.200
CCS
L90
Status
现行
Issue Date
1996-09-09
Implementation
1997-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A