GB/T 15909-2017

Active

Gas for electronic industry—Silane

电子工业用气体 硅烷

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
现行
Issue Date
2017-05-31
Implementation
2017-12-01
Responsible Dept
国家标准委
Drafting Unit
N/A