GB/T 15909-2009

Abolished

Gas for electronic industry - Silane

电子工业用气体 硅烷(SiH4)

Standard Type
GBT
ICS
71.100.20
CCS
G86
Status
废止
Issue Date
2009-10-30
Implementation
2010-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A