GB/T 15873-1995

Active

Directives for drafting semiconductor facilities interface specification

半导体设施接口技术文件编写导则

Standard Type
GBT
ICS
31.220.10
CCS
L97
Status
现行
Issue Date
1995-12-22
Implementation
1996-08-01
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A