GB/T 15872-2013

Active

Power supply interface for semiconductor equipment

半导体设备电源接口

Standard Type
GBT
ICS
31.220.10
CCS
L23
Status
现行
Issue Date
2013-12-17
Implementation
2014-05-15
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A