GB/T 15872-1995

Abolished

Power supply interface for semiconductor equipment

半导体设备电源接口

Standard Type
GBT
ICS
31.220.10
CCS
L97
Status
废止
Issue Date
1995-12-22
Implementation
1996-08-01
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A