GB/T 15861-2012

Active

General specification of ion beam etching system

离子束蚀刻机通用规范

Standard Type
GBT
ICS
N/A
CCS
L97
Status
现行
Issue Date
2012-11-05
Implementation
2013-02-15
Responsible Dept
工业和信息化部（电子）
Drafting Unit
N/A