GB/T 1554-2009

Active

Testing method for crystallographic perfection of silicon by preferential etch techniques

硅晶体完整性化学择优腐蚀检验方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A