GB/T 14847-2025

Active

Test method for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates—Infrared reflectance method

重掺杂衬底上轻掺杂硅外延层厚度的测试 红外反射法

Standard Type
GBT
ICS
77.040
CCS
H21
Status
现行
Issue Date
2025-10-31
Implementation
2026-05-01
Responsible Dept
国家标准委
Drafting Unit
N/A