Home / Standards / GB/T 14847-2010 GB/T 14847-2010 Abolished Test mothod for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates by infrared reflectance 重掺杂衬底上轻掺杂硅外延层厚度的红外反射测量方法 Standard Type GBT ICS 29.045 CCS H80 Status 废止 Issue Date 2011-01-10 Implementation 2011-10-01 Responsible Dept 国家标准委 Drafting Unit 国家标准委