Home / Standards / GB/T 14847 GB/T 14847 Active Test method for thickness of lightly doped silicon epitaxial layers on heavily doped silicon substrates—Infrared reflectance method 重掺杂衬底上轻掺杂硅外延层厚度的测试 红外反射法 Standard Type GBT ICS 77.040 CCS H21 Status 现行 Issue Date 2025-10-31 Implementation 2026-05-01 Responsible Dept 国家标准委 Drafting Unit 国家标准委