GB/T 14146-2021

Active

Test method for carrier concentration of silicon epitaxial layers—Capacitance-voltage method

硅外延层载流子浓度的测试电容-电压法

Standard Type

GBT

ICS

77.040

CCS

H21

Status

现行

Issue Date

2021-05-21

Implementation

2021-12-01

Responsible Dept

国家标准委

Drafting Unit

N/A