GB/T 14146-2009

Abolished

Silicon epitaxial layers-determination of carrier concentration-mercury probe voltages-capacitance method

硅外延层载流子浓度测定 汞探针电容-电压法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
废止
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A