GB/T 14144-2009

Active

Testing method for determination of radial interstitial oxygen variation in silicon

硅晶体中间隙氧含量径向变化测量方法

Standard Type
GBT
ICS
29.045
CCS
H80
Status
现行
Issue Date
2009-10-30
Implementation
2010-06-01
Responsible Dept
国家标准委
Drafting Unit
N/A