GB/T 14142-2017

Active

Test method for crystallographic perfection of epitaxial layers in silicon—Etching technique

硅外延层晶体完整性检验方法 腐蚀法

Standard Type
GBT
ICS
77.040
CCS
H25
Status
现行
Issue Date
2017-09-29
Implementation
2018-04-01
Responsible Dept
国家标准委
Drafting Unit
N/A