GB/T 14142-1993

Abolished

Test method for crystallographic perfection of epit-axial layers in silicon by etching techniques

硅外延层晶体完整性检查方法 腐蚀法

Standard Type
GBT
ICS
N/A
CCS
H26
Status
废止
Issue Date
1993-02-06
Implementation
1993-10-01
Responsible Dept
国家标准委
Drafting Unit
N/A